SEM Nano-Probe Station
The ZEPTOOLS SEM Nano-Probe Station is a vacuum-compatible, three-axis positioning and manipulation platform for in-situ SEM applications. Multiple three-axis probe stages can be installed in one SEM chamber and configured with electrical probes, fiber-optic probes, nanotweezers, diamond nanoindenters, microinjectors, and other compatible manipulation or measurement heads.
Three-axis probe-stage architecture
Each three-axis stage consists of three single-axis motion stages
Multiple three-axis probe stages can be installed in one SEM chamber
Precise positioning in three-dimensional space
Compact structure with high rigidity
Large travel range described by the manufacturer; numerical value not published
Zero-backlash flexible-hinge guidance system
Piezoelectric ceramic displacement platform
Internal position feedback available on request
Compatible with high-vacuum environments
Interchangeable manipulation and measurement heads
Base designed for SEM/FIB compatibility
Electrical probes
Fiber-optic probes
Nanotweezers
Diamond nanoindenters
Microinjectors
Probe body
Base compatible with SEM/FIB
Vacuum flange
Probe controller
Control handle
Cryogenic sample stage
High-temperature sample stage
Fiber-optic clamps
Fiber-optic vacuum feedthroughs
EBIC kit
Nanomaterial manipulation
Electrical-property measurement of nanodevices
Optoelectronic-property measurement of nanodevices
Biological-cell and DNA manipulation
SEM Nano-Probe Station for In-Situ Manipulation and Measurement
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| Prod# | Description | Unit | Price | Order/Quote |
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| SEM Nano-Probe Station | In-Situ SEM Solution | System | P.O.R | Qty: Add to cart |
How can I request a quotation?
Provide EMART with the SEM or FIB model, chamber and stage details, number of probes, required probe heads, sample geometry, electrical or optical measurement needs, temperature requirements, feedthrough availability, and installation location. EMART will confirm the suitable configuration with the manufacturer..